JPH0158442B2 - - Google Patents

Info

Publication number
JPH0158442B2
JPH0158442B2 JP56005942A JP594281A JPH0158442B2 JP H0158442 B2 JPH0158442 B2 JP H0158442B2 JP 56005942 A JP56005942 A JP 56005942A JP 594281 A JP594281 A JP 594281A JP H0158442 B2 JPH0158442 B2 JP H0158442B2
Authority
JP
Japan
Prior art keywords
interference
inspected
defect
image
reference mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56005942A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57120805A (en
Inventor
Tomohiro Kuni
Kazuo Yamaguchi
Nobuyuki Akyama
Shigeo Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP594281A priority Critical patent/JPS57120805A/ja
Publication of JPS57120805A publication Critical patent/JPS57120805A/ja
Priority to US06/695,231 priority patent/US4647196A/en
Publication of JPH0158442B2 publication Critical patent/JPH0158442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP594281A 1981-01-20 1981-01-20 Inspecting method of surface defect Granted JPS57120805A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP594281A JPS57120805A (en) 1981-01-20 1981-01-20 Inspecting method of surface defect
US06/695,231 US4647196A (en) 1981-01-20 1985-01-28 Surface flaw detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP594281A JPS57120805A (en) 1981-01-20 1981-01-20 Inspecting method of surface defect

Publications (2)

Publication Number Publication Date
JPS57120805A JPS57120805A (en) 1982-07-28
JPH0158442B2 true JPH0158442B2 (en]) 1989-12-12

Family

ID=11624947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP594281A Granted JPS57120805A (en) 1981-01-20 1981-01-20 Inspecting method of surface defect

Country Status (1)

Country Link
JP (1) JPS57120805A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356543U (en]) * 1989-10-03 1991-05-30

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823565B2 (ja) * 1977-07-08 1983-05-16 日本電信電話株式会社 平面形状測定方式

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0356543U (en]) * 1989-10-03 1991-05-30

Also Published As

Publication number Publication date
JPS57120805A (en) 1982-07-28

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